Combinatorial synthesis of diamond

摘要

Disclosed is a combinatorial synthesis of Diamond wherein a first reactive species is produced by catalytic treatment of Acetylene, a second reactive species is produced by decomposition of a hydrocarbon source having a low Hydrogen-to-Carbon ratio using a high energy discharge, and the two reactive species so obtained are combined in the vapor phase to yield Diamond without the need of post-treatments. The reaction is efficient and affords Diamond under mild conditions with high purity such that it may be useful for producing Diamond for semiconductor and microelectronics applications.

主权项

1. A method for combinational vapor phase synthesis of diamond in an oxygen free environment, said method comprising:
a) exposing acetylene to a heated metal catalyst having olefin metathesis activity, thereby forming a first reactive species, said first reactive species being a transient intermediate; b) obtaining a second reactive species, said second reactive species being derived from a hydrocarbon source subjected to a high energy discharge or plasma, said second reactive species being a highly reactive atomic carbon; and c) reacting said first reactive species with said second reactive species, thereby forming diamond, wherein said first reactive species and said second reactive species are in a vapor phase for the formation of the diamond, and wherein the metal catalyst is maintained at a temperature below that at which the decomposition of acetylene occurs.