Arrangement of reticle positioning device for actinic inspection of EUV reticles

摘要

A reticle positioning apparatus for actinic EUV reticle inspection including a sealed inspection chamber containing a reticle stage for holding a reticle. The reticle stage has a magnetically suspended upper stage with a long travel in a “y” direction and a magnetically suspended lower stage with a long travel in an “x” direction; and a cable stage chamber isolated from the inspection chamber by a cable chamber wall. The cable stage chamber has a cable stage movable in the “y” direction; and a tube connected at one end to the reticle stage and to the cable stage at the other end. The tube passes from the cable stage through the inspection chamber through a seal in the chamber wall and opening into the cable entry chamber for entry of cables and hoses within the cable stage chamber, which cables and hoses pass through the tube to the reticle stage.

主权项

1. A reticle positioning apparatus for actinic EUV reticle inspection comprising:
a sealed inspection chamber containing: a reticle stage for holding a reticle, said reticle stage having an upper stage with a long travel in a y direction and a lower stage with a long travel in an x direction; and a cable entry chamber isolated from the inspection chamber by a cable chamber wall, said cable entry chamber having a cable stage movable in the y direction, and a tube connected at a reticle stage end to the reticle stage and within the cable stage chamber to the cable stage, said tube passing from the cable stage through the inspection chamber through a seal in the chamber wall and opening into the cable stage chamber for entry of cables and hoses within the cable stage chamber, which cables and hoses pass through the tube to the reticle stage, said cable stage being slaved to the reticle stage such that movement of the upper stage in the y direction, at the location of the tube, is detected and provided to signal the cable stage to move the distance of movement of the upper stage in the y direction.