Method of forming fine patterns of semiconductor device by using double patterning process which uses acid diffusion

摘要

A method of forming fine patterns of a semiconductor device according to a double patterning process that uses acid diffusion is provided. In this method, a plurality of first mask patterns are formed on a substrate. A capping film including an acid source is formed on the exposed surface areas of the plurality of first mask patterns. A second mask layer is formed on the capping films. A plurality of acid diffused regions are formed within the second mask layer by diffusing acid obtained from the acid source from the capping films into the second mask layer. A plurality of second mask patterns are formed of residual parts of the second mask layer which remain after removing the acid diffused regions of the second mask layer.

主权项

1. A method of forming fine patterns of a semiconductor device, the method comprising:
forming a plurality of first mask patterns on a substrate; forming a capping film on exposed surface areas of each of the plurality of first mask patterns, wherein the capping film comprises an acid source comprising one of acid, a first photoacid generator having a chromophore group, and a thermoacid generator; forming a second mask layer on the capping film, wherein the second mask layer comprises polymer having an acid-labile group and a second photoacid generator not having a chromophore group; forming a plurality of acid diffused regions within the second mask layer by diffusing acid obtained from the acid source from the capping film into the second mask layer; removing the acid diffused regions of the second mask layer; and forming a plurality of second mask patterns corresponding to residual parts of the second mask layer which remain after removing the acid diffused regions of the second mask layer.