发明名称 |
Micro gyroscope for determining rotational movements about three spatial axes which are perpendicular to one another |
摘要 |
A micro gyroscope determine three-dimensional rotational movements is mounted on a substrate on which a plurality of masses tangentially oscillate about the z axis perpendicular to the substrate. The oscillating masses are fastened to the substrate by springs and bolts. Driving elements maintain oscillating tangential vibrations of the masses about the z axis. Upon rotation of the substrate about any spatial axis, the masses are subjected to deflections caused by Corolis forces that are detected by sensor elements. Certain masses oscillating about the z axis are tiltable about the x axis, while some others are tiltable about the y axis. At least one other mass is configured to deflect radially to the z axis in a x-y plane parallel to the plane of the substrate. This mass is assigned a sensor element that can deflect radially with respect to the axis but cannot oscillate about the z axis. |
申请公布号 |
US8776599(B2) |
申请公布日期 |
2014.07.15 |
申请号 |
US201013258177 |
申请日期 |
2010.03.08 |
申请人 |
Maxim Integrated Products, Inc. |
发明人 |
Hammer Hanno |
分类号 |
G01P15/14 |
主分类号 |
G01P15/14 |
代理机构 |
North Weber & Baugh LLP |
代理人 |
North Weber & Baugh LLP |
主权项 |
1. A micro gyroscope to determine rotational movements about three perpendicularly stacked spatial axes x, y and z, the gyroscope comprising:
a substrate on which several tangentially oscillating masses are arranged about the z axis that is perpendicularly positioned on the substrate, the oscillating masses are fastened to the substrate with springs and tie bolts; drive elements to maintain oscillating tangential vibrations of the masses about the z axis, as a result of which the masses are subject to Coriolis forces and the deflections caused by the Coriolis forces when the substrate rotates around any spatial axis; and sensor elements to register the deflection of the masses caused by the Coriolis forces, wherein some of the masses oscillating about the z axis are tiltably arranged about the x axis that runs parallel to the substrate, other masses oscillating about the z axis are essentially tiltably arranged about the y axis that runs parallel to the substrate, and at least one of the oscillating masses can be also be deflected at least partially radially with respect to the z axis in the x-y plane parallel to the plane of the substrate, this z mass can be additionally deflected radially and is allocated to an oscillating sensor element that can also be deflected radially with regard to the z axis but not about the z axis. |
地址 |
San Jose CA US |