发明名称 Image sensor and process thereof
摘要 An image sensor includes a plurality of color filters and an anti-reflective layer. The color filters are located on a substrate. The anti-reflective layer is located between the substrate and the color filters, and parts of the anti-reflective layer corresponding to at least two of the color filters have different thicknesses. Moreover, an image sensing process including the following steps is also provided. An anti-reflective layer is formed on a substrate. A plurality of color filters is formed on the anti-reflective layer, wherein parts of the anti-reflective layer right below at least two of the color filters have different thicknesses.
申请公布号 US8779484(B2) 申请公布日期 2014.07.15
申请号 US201213688216 申请日期 2012.11.29
申请人 United Microelectronics Corp. 发明人 Shen Xu Yang;Liau Seng Wah;Liu Yuheng;Li Qin;Chow Kiet Houng
分类号 H01L31/062 主分类号 H01L31/062
代理机构 代理人 Hsu Winston;Margo Scott
主权项 1. An image sensor, comprising: a plurality of color filters located on a substrate; and an anti-reflective layer located between the substrate and the color filters and directly below the color filters, parts of the anti-reflective layer corresponding to at least two of the color filters having different thicknesses, wherein the bottom surfaces of the color filters are not coplanar.
地址 Science-Based Industrial Park, Hsin-Chu TW