Fabrication of graphene electronic devices using step surface contour

摘要

A method for fabricating an electronic component, comprising providing a substrate; and depositing a graphene layer; wherein the substrate is either provided with a van-der-Waals functional layer or a van-der-Waals functional layer is deposited on the substrate before depositing the graphene layer; a surface step contour is formed; and growth of the graphene layer is seeded at the step contour.

主权项

1. A method for fabricating an electronic component, comprising:
providing a substrate and a plurality of surface step contours on the substrate; and depositing a van der Waals layer adjacent to the surface step contours; and depositing a graphene layer on the van der Waals layer; wherein growth of the graphene layer is seeded at a kink of the surface step contours.