Method of manufacturing high resolution organic thin film pattern

摘要

A method of forming a high resolution organic thin film pattern, the method including forming a first organic layer on a substrate; selectively removing the first organic layer by selectively irradiating light energy onto the first organic layer, and forming a remaining part of the first organic layer as a sacrifice layer; forming a second organic layer on the substrate and the entire surface of the sacrifice layer; and lifting off the second organic layer formed on the sacrifice layer by removing the sacrifice layer using a solvent, and forming the remaining second organic layer as a second organic layer pattern.

主权项

1. A method of forming an organic thin film pattern, the method comprising:
forming a first organic layer comprising a fluorine-based polymer on a substrate; removing a part of the first organic layer by irradiating light energy onto the first organic layer, and forming a remaining part of the first organic layer as a sacrifice layer; forming a second organic layer on the substrate and the entire surface of the sacrifice layer; and lifting off the second organic layer formed on the sacrifice layer by removing the sacrifice layer using a water-free fluorine-based solvent, and forming the remaining second organic layer as a second organic layer pattern.