Photodetectors useful as ambient light sensors and methods for use in manufacturing the same

摘要

Photodetectors, methods for use in manufacturing photodetectors, and systems including photodetectors, are described herein. In an embodiment, a photodetector includes a plurality of photodiode regions, at least some of which are covered by an optical filter. A plurality of metal layers are located between the photodiode regions and the optical filter. The metal layers include an uppermost metal layer that is closest to the optical filter and a lowermost metal layer that is closest to the photodiode regions. One or more inter-level dielectric layers separate the metal layers from one another. Each of the metal layers includes one or more metal portions and one or more dielectric portions. The uppermost metal layer is devoid of any metal portions underlying the optical filter.

主权项

1. A photodetector, comprising:
a plurality of photodiode regions; an optical filter covering one or more of the photodiode regions; a plurality of metal layers located between the photodiode regions and the optical filter, wherein the plurality of metal layers include an uppermost metal layer that is closest to the optical filter and a lowermost metal layer that is closest to the photodiode regions; and one or more inter-level dielectric layers that separate the metal layers from one another; wherein each of the metal layers includes one or more metal portions and one or more dielectric portions; and wherein the uppermost metal layer is devoid of any metal portions underlying the optical filter.