主权项 |
1. A drive mechanism for the movement of an object along an axis of motion, the drive mechanism comprising:
two clamping elements, and a drive element disposed between the two clamping elements which enables a relative movement of the two clamping elements along the axis of motion, wherein each clamping element comprises: a base body, a piezo-actuator, and two clamping jaws, the piezo-actuator serving to displace at least one of the two clamping jaws to produce a clamping force acting on the object which clamping force is directed transversely to the axis of motion, wherein the base bodies of the two clamping elements are directly connected by at least two expansible elements, wherein the drive element comprises a further piezo-actuator serving to displace the base bodies of the two clamping elements relatively to each other along the axis of motion, the further piezo-actuator secured between the base bodies of the two clamping elements such that the at least two expansible elements pre-tension the further piezo-actuator, and wherein at least one of the first clamping element, the second clamping element and the drive element comprises a hydraulic amplifier serving to enlarge and transmit a length variation of the associated piezo-actuator to the associated clamping element or drive element, respectively. |