发明名称 |
Method of fabricating a neutron detector such as a microstructured semiconductor neutron detector |
摘要 |
A method of making a neutron detector such as a microstructured semiconductor neutron detector is provided. The method includes the step of providing a particle-detecting substrate having a surface and a plurality of cavities extending into the substrate from the surface. The method also includes filling the plurality of cavities with a neutron-responsive material. The step of filling including the step of centrifuging nanoparticles of the neutron-responsive material with the substrate for a time and a rotational velocity sufficient to backfill the cavities with the nanoparticles. The material is responsive to neutrons absorbed, thereby, for releasing ionizing radiation reaction products. |
申请公布号 |
US8778715(B2) |
申请公布日期 |
2014.07.15 |
申请号 |
US201313924839 |
申请日期 |
2013.06.24 |
申请人 |
Radiation Detection Technologies, Inc. |
发明人 |
Bellinger Steven L.;Fronk Ryan G.;McGregor Douglas S. |
分类号 |
H01L21/00;H01L31/115;H01L31/18;B82Y40/00 |
主分类号 |
H01L21/00 |
代理机构 |
Brooks Kushman P.C. |
代理人 |
Brooks Kushman P.C. |
主权项 |
1. A method of making a neutron detector, the method comprising:
providing a particle-detecting substrate having a surface and a plurality of cavities extending into the substrate from the surface; and filling the plurality of cavities with a neutron-responsive material, the step of filling including the step of centrifuging nanoparticles of the neutron-responsive material with the substrate for a time and at a rotational velocity sufficient to backfill the cavities with the nanoparticles, the material being responsive to neutrons absorbed thereby for releasing ionizing radiation reaction products. |
地址 |
Manhattan KS US |