发明名称 System with recessed sensing or processing elements
摘要 Backside recesses in a base member host components, such as sensors or circuits, to allow closer proximity and efficient use of the surface space and internal volume of the base member. Recesses may include covers, caps, filters and lenses, and may be in communication with circuits on the frontside of the base member, or with circuits on an active backside cap. An array of recessed components may a form complete, compact sensor system.
申请公布号 US8779532(B2) 申请公布日期 2014.07.15
申请号 US201313767214 申请日期 2013.02.14
申请人 Analog Devices, Inc. 发明人 O'Donnell Alan J.;Cusack Michael J.;McGeehan Rigan F.;Griffin Garrett A.
分类号 H01L27/14 主分类号 H01L27/14
代理机构 Sunstein Kann Murphy & Timbers LLP 代理人 Sunstein Kann Murphy & Timbers LLP
主权项 1. A sensor system comprising: a laminate base comprising a plurality of layers including at least a top layer having a top surface, a bottom layer having a bottom surface, and a plurality of internal layers between the top layer and the bottom layer, the laminate base having a side surface extending between the top surface the bottom surface, the top surface, bottom surface and side surface comprising an external surface of the laminate base; the top layer including a top layer aperture extending from the top surface through the top layer; a sensor layer among the plurality of internal layers, the sensor layer including a first sensor within said sensor layer; a second within said sensor layer; at least a first intervening layer among the plurality of internal layers, the intervening layer disposed between the top layer and the sensor layer, and including an internal aperture extending through the intervening layer, the internal aperture aligned with the top layer aperture and aligned with the first sensor so as to expose the first sensor to an external environment; and an electrically conductive via embedded within one of the plurality of internal layers and electrically coupled to the first sensor.
地址 Norwood MA US