发明名称 Apparatus for attaching functional film
摘要 An apparatus for attaching a functional film is disclosed. The apparatus for attaching a functional film according to an embodiment of the present invention comprises: a table which forms a space in which a panel is adsorbed in vacuum to progress a panel loading/unloading process, a protective film peeling process, a panel inspection process, and a functional film attaching process for the panel, and comprises a stage in which an adsorption surface of the panel is divided into a high suction part and a low suction part; and a vacuum module for generating a vacuum pressure to the adsorption surface of the stage by being attached to the stage.
申请公布号 KR101419350(B1) 申请公布日期 2014.07.15
申请号 KR20120118287 申请日期 2012.10.24
申请人 发明人
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
代理机构 代理人
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