发明名称 HIGH PERFORMANCE MINIATURE RF SENSOR FOR USE IN MICROELECTRONICS PLASMA PROCESSING TOOLS
摘要 A high-performance miniature RF sensor that maintains gain, directivity, and isolation in a miniature package. The miniature RF sensor includes stacked current and voltage pickups disposed in a PCB construction, the sensor further including quarter wave transforming filter, triaxial shielding, and skin-effect filtering.
申请公布号 KR20140089433(A) 申请公布日期 2014.07.14
申请号 KR20147015804 申请日期 2007.03.20
申请人 INFICON, INC. 发明人 GARVIN CRAIG;BONNER MICHAEL;ROSYS KENNETH
分类号 G01R19/145;G01R15/18;H05H1/46 主分类号 G01R19/145
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