METHODS OF MANUFACTURING A ZINC OXIDE THIN LAYER STRUCTURE

摘要

Provided is a method of manufacturing a zinc oxide-based thin film structure which includes the steps of forming a first zinc oxide-based thin film on a substrate at first temperature in a first chemical vapor deposition process; and forming a second zinc oxide-based thin film on the first zinc oxide-based thin film at second temperature which is lower than the first temperature in a second chemical vapor deposition process, wherein a difference between the second temperature and the first temperature is set to 100°C or less. Therefore, it is possible to manufacture a zinc oxide-based thin film structure having excellent crystalline quality at a relatively low temperature.