| 摘要 |
A sensor-equipped apparatus for manufacturing organic electroluminescent display devices is provided to measure the thickness of a deposition layer accurately by arranging a sensor which directly measures the thickness of the deposition layer. A supporting unit(4) fixes a glass substrate(1) and a mask(5). A sensor(3) is arranged in a rear direction of the glass substrate in order to measure the thickness of a film growing pattern(2a) formed on the glass substrate. A shutter(7) is arranged in a lower part of the mask. A guide member(8) is arranged below the shutter. A plurality of lamps(9) are arranged along the circumference of the guide member. A source(10) is located below the guide member to spray film materials. A first and second heater(11,14) are arranged on the source and a nozzle(12) respectively. |
