发明名称 THIN-FILM TRANSISTOR AND THIN-FILM TRANSISTOR DISPLAY BOARD
摘要 <p>PROBLEM TO BE SOLVED: To prevent the performance deterioration of a thin-film transistor using an oxide semiconductor.SOLUTION: The thin-film transistor includes: a channel region including the oxide semiconductor; a source electrode and a drain electrode connected to the channel region and disposed on both sides of the channel region so as to face to each other; an insulating layer disposed on the channel region; a gate electrode disposed on the insulating layer; and a protective film disposed on the source electrode and the drain electrode. The drain electrode has a first drain region and a second drain region that excludes the first drain region. The protective film has a first contact hole for exposing the first drain region of the drain electrode. The charge mobility of the first drain region is equal to or higher than the charge mobility of the second drain region.</p>
申请公布号 JP2014131047(A) 申请公布日期 2014.07.10
申请号 JP20130273440 申请日期 2013.12.27
申请人 SAMSUNG DISPLAY CO LTD 发明人 CHA MYOUNG GEUN ; LEE YONG SU ; KHANG YOON-HO ; NA HYUN JAE ; YU SE HWAN ; LEE JONG CHAN ; SHIM DONG HWAN
分类号 H01L29/786;H01L21/28;H01L29/417;H01L51/50;H05B33/14 主分类号 H01L29/786
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