COPPER ALLOY HOT-ROLLED SHEET FOR SPUTTERING TARGET, AND SPUTTERING TARGET

摘要

PROBLEM TO BE SOLVED: To provide a Cu-Ca-based copper alloy hot-rolled sheet for sputtering target, which is capable of suppressing generation of abnormal discharge in sputtering, and a sputtering target using the same.SOLUTION: Provided is a Cu-Ca-based copper alloy hot-rolled sheet containing Ca of 0.5 to 10.0 atomic%, with the balance substantially being Cu, in which the average grain size of Cu-α phase grains in the base alloy is regulated within the range of 5 to 60 μm.