发明名称 |
Catalytic Etch With Magnetic Direction Control |
摘要 |
A material can be locally etched with arbitrary changes in the direction of the etch. A ferromagnetic-material-including catalytic particle is employed to etch the material. A wet etch chemical or a plasma condition can be employed in conjunction with the ferromagnetic-material-including catalytic particle to etch a material through a catalytic reaction between the catalytic particle and the material. During a catalytic etch process, a magnetic field is applied to the ferromagnetic-material-including catalytic particle to direct the movement of the particle to any direction, which is chosen so as to form a contiguous cavity having at least two cavity portions having different directions. The direction of the magnetic field can be controlled so as to form the contiguous cavity in a preplanned pattern, and each segment of the contiguous cavity can extend along an arbitrary direction. |
申请公布号 |
US2014191371(A1) |
申请公布日期 |
2014.07.10 |
申请号 |
US201313735314 |
申请日期 |
2013.01.07 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
Joseph Eric A.;Abraham David W.;Cheek Roger W.;Schroit Alejandro G.;Zhang Ying |
分类号 |
H01L21/306;H01L29/06;H01L21/67 |
主分类号 |
H01L21/306 |
代理机构 |
|
代理人 |
|
主权项 |
1. A method of etching a material, said method comprising:
disposing at least one ferromagnetic-material-including catalytic particle on a material; performing a catalytic etch process on said material by activating said at least one ferromagnetic-material-including catalytic particle with a chemical or a plasma; and changing a direction of propagation of said at least one ferromagnetic-material-including catalytic particle during said catalytic etch process by changing a direction of a gradient of a magnetic field applied to said at least one ferromagnetic-material-including catalytic particle. |
地址 |
Armonk NY US |