MICROELECTROMECHANICAL GYROSCOPE WITH COMPENSATION OF QUADRATURE SIGNAL COMPONENTS

摘要

A gyroscope includes: a mass, which is movable with respect to a supporting body; a driving loop for keeping the mass in oscillation according to a driving axis; a reading device, which supplying an output signal indicating an angular speed of the body; and a compensation device, for attenuating spurious signal components in quadrature with respect to a velocity of oscillation of the mass. The reading device includes an amplifier, which supplies a transduction signal indicating a position of the mass according to a sensing axis. The compensation device forms a control loop with the amplifier, extracts from the transduction signal an error signal representing quadrature components in the transduction signal, and supplies to the amplifier a compensation signal such as to attenuate the error signal.

主权项

1. A microelectromechanical gyroscope, comprising:
a supporting body; a sensing mass elastically coupled to the supporting body and movable with respect to the supporting body according to a driving axis and a sensing axis; a microelectromechanical driving loop coupled to the sensing mass and operable to maintain the sensing mass in oscillation according to the driving axis at a frequency; a reading device coupled to the sensing mass and configured to provide an output signal representative of an angular speed of the supporting body, the reading device including a reading amplifier configured to provide a transduction signal representative of a position of the sensing mass according to the sensing axis; and a compensation device configured to reduce spurious signal components in quadrature with respect to a velocity of oscillation of the sensing mass according to the driving axis, the compensation device being configured to form a feedback control loop with the reading amplifier and configured to extract, from the transduction signal, an error signal representative of quadrature components in the transduction signal and configured to provide the reading amplifier with a compensation signal that is a function of the error signal and is configured to reduce the quadrature components in the transduction signal.