| 摘要 |
FIELD: electricity.SUBSTANCE: device to produce an electrode material comprises a spattering module with an evaporative system and an evaporated material feed mechanism, a rewinding system, a pumping system, a pneumatic system, a cooling system, a control system and a movement mechanism capable for coupling and decoupling with the spattering module. The rewinding system is made as a rigid block consisting of two plates, the front and rear ones, interconnected by supports; it contains water-cooled guide rollers, non-cooled deflecting rollers and tension rollers. The rigid block is fixed by its rear plate to the external plate placed in the movement mechanism by fixing units ensuring self-support in case of the external plate deflection. In order to transfer rotation from drives and actuating mechanisms a magnetic fluid rotary-motion feedthrough is installed at the water-cooled guide rollers thus compensating deflection of the external plate.EFFECT: usage for the receipt of functional coatings during production of electronic equipment.5 cl, 4 dwg |
