| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck which can reduce occurrence of temperature unevenness on the attraction side (first principal surface side) of the electrostatic chuck, and thereby occurrence of temperature unevenness for an object attracted to the electrostatic chuck can be reduced.SOLUTION: An electrostatic chuck 1 is provided, between an attraction substrate 9 and a heater member 13, an anisotropic heat conductor having a heat conductivity dependent on the direction, i.e. a graphite sheet 11 that is an anisotropic heat conductor in which the heat conductivity in a direction perpendicular to the lamination direction is higher than that in the lamination direction. Since heat is transmitted easily in the plane direction of the surface by the graphite sheet 11, even if there is uneven heating state, temperature unevenness is reduced in the plane direction. Consequently, temperature unevenness of the attraction substrate 9 can be reduced. |
