| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a phase plate capable of manufacturing a phase plate by a simple step.SOLUTION: A method of manufacturing a phase plate for a transmission electron microscope, includes: a step S100 of depositing a first layer on a substrate; a step S102 of patterning the first layer to form a through-hole penetrating through the first layer; a step S104 etching an opposite surface to a surface where the first layer is deposited of the substrate to form an opening communicated with the through-hole and exposing the first layer; and a step S106 depositing a second layer on the first layer. |
