CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To solve such a problem that nondestruction defect extraction and analysis take time to switch the acceleration voltage, or the like, and electron beam irradiation with high acceleration voltage causes defects or contamination.SOLUTION: Luminance associated conditioning of a BSE (Back Scattered Electron) image is performed by luminance feature classification in the ADC (Automatic Defect Classification) function of a defect extraction device. Information of the luminance associated conditioning is stored (316), and this information is operated as a recipe file. Consequently, simple elemental analysis of a defect or a wafer, and shortening of processing time can be achieved without using an acceleration voltage≥3,000 V. Furthermore, since repeated irradiation of a defect or a wafer with an electron beam is eliminated, contamination can be reduced.