| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an MEMS optical scanner that suppresses occurrence of peeling of a piezoelectric film and has high durability.SOLUTION: A MEMS optical scanner (1) includes: a reflection section (51) that is formed on a surface of a substrate (5) and reflects light: a drive section (53) for driving the reflection section (51) with a piezoelectric film (55) installed on the surface of the substrate (5) while supporting the reflection section (51); and a base (54) for fixing a part of the drive section (53). The drive section (53) includes a fixed section (531) fixed to the support section (54); and a movable section (532) that is separate from the support section (54) and extends from the fixed section (531) toward the reflection section (51). The piezoelectric film (55) includes cut sections (57) at corresponding positions between the fixed section (531) and the movable section (532).</p> |
