| 主权项 |
1. A composition for forming a bottom anti-reflective coating, comprising
a solvent, a polymer represented by the following formula (1):
-Am-Bn- (1) in which A and B are repeating units represented by the following formulas (A) and (B), respectively: whereineach of R11 and R12 is independently hydrogen or an alkyl group;L11 is a single bond, COO or a straight- or branched chain alkylene containing one or more carbon atoms;Y is a condensed polycyclic aromatic group containing two or more benzene rings; andZ is a group selected from the group consisting of R3COOR4 and R3OR4, provided that R3 is a single bond, oxygen or a straight- or branched chain alkylene which may have a fluorine atom and which contains one or more carbon atoms and also provided that R4 is hydrogen or a substituted or non-substituted hydrocarbon group; each of m and n is a number indicating the polymerization degree provided that m is not less than 10 and n is not less than 0; and,a compound comprising an anhydride represented where the compound is represented by any of the following formulas (2) to (4): is represented by any of the following formulas (2) to (4): in which each of R21, R22 and R23 is independently a group selected from the group consisting of hydrogen, alkyl, aryl, halogen atom, alkoxy, nitro, aldehyde, cyano, amido, dialkylamino, sulfonamide, imido, carboxylic acid, carboxylic acid ester, sulfonic acid, sulfonic acid ester, alkylamino, and arylamino; in which each of R41 and R42 is independently a group selected from the group consisting of hydrogen, alkyl, aryl, halogen atom, alkoxy, nitro, aldehyde, cyano, amido, dialkylamino, sulfonamide, imido, carboxylic acid, carboxylic acid ester, sulfonic acid, sulfonic acid ester, alkylamine, and arylamino. |
