FLUID CONTROL VALVE AND MASS FLOW CONTROLLER

摘要

In order to, in a short period of time, reduce to zero a measured flow rate value measured after fully closing a fluid control valve, the fluid control valve having a configuration suitable to decrease the inside volume of the fluid control valve is configured together with a valve element member, and a valve seat block provided with: an in-valve flow path that is formed inside of the valve seat block; and a valve seat surface that is brought into contact with or separated from a seating surface of the valve element member is provided with a cutout that is formed in a part of a protruded rim so as to be communicatively connected to a downstream side flow path.

主权项

1. A fluid control valve configured to include a valve seat block and a valve element member, the valve seat block comprising: an in-valve flow path that is formed inside of the valve seat block; and a valve seat surface that is brought into contact with or separated from a seating surface of the valve element member, wherein
the valve seat block further comprises: one end surface part that is at an upstream end of the in-valve flow path and formed with an inflow opening connected to an upstream side flow path; the other end surface part that is at a downstream end of the in-valve flow path and formed with an outflow opening through which fluid flowing in from the inflow opening flows outside the valve seat block; a protruded rim that is protruded by a predetermined height so as to surround the outflow opening in the other end surface part, and comprises a pressed surface that is pressed toward a one end surface part side during assembly; and a cutout that is formed in a part of the protruded rim so as to be communicatively connected to a downstream side flow path.