APPARATUS FOR CONTROLLING ALIGNMENT OF ELECTRON BEAM IRRADIATOR AND METHOD THEREOF

摘要

According to an embodiment of the present invention, a device for adjusting the alignment of electronic beams includes: an electronic beam radiating body which is installed in the upper part of a chamber to be connected to the chamber in which a sample is placed and has a hollow shape; an electronic gun which includes an electronic beam radiation member installed inside the electronic beam radiating body and radiating electronic beams to the sample and a guide tube for guiding electronic beams; and a beam alignment unit which includes a first quadrupole unit made up of a plurality of first polar bobbins which are placed separately in a radial shape with regular intervals frame each other from the guide tube and on the outer circumferential surface of which coils are wound and a second quadrupole unit made up of a plurality of second polar bobbins which are placed separately in a radial shape with regular intervals from each other and in parallel to the first polar bobbins in two lines and on the outer circumferential surface of which coils are wound. The beam alignment unit adjusts the alignment of electronic beams to radiate electronic beams passing through the guide tube by first repulsion force among the first polar bobbins and second repulsion force among the second polar bobbins on the same line with the central axis of the guide tube, when current is applied to the first and the second quadrupole unit.