| 摘要 |
PROBLEM TO BE SOLVED: To provide an end effector which allows for detection of whether or not there is a substrate in a cassette and whether or not the substrate is held normally, by a simple configuration in a substrate transfer robot.SOLUTION: An end effector 1 includes a hand 10, a substrate holding part 11 provided in the hand 10, mapping detection parts 12 provided at the tips 10a and 10b of the hand, a light-emitting part 13 provided in the hand 10 and generating detection light, a light-receiving part 14 provided in the hand 10 and receiving the detection light and then converting it into an electric output, and an optical path 15 through which the detection light emitted from the light-emitting part 13 passes to enter the light-receiving part 14. The optical path 15 is formed so that the detection light B1 is blocked by a substrate W in a cassette 6 detected by the mapping detection part 12, and the detection light B2 is blocked by a substrate W held by the substrate holding part 11. |
