发明名称 |
METHODS FOR ETCHING THROUGH-WAFER VIAS IN A WAFER |
摘要 |
Apparatus and methods for plasma etching are disclosed. In one embodiment, a method for etching a plurality of features on a wafer includes positioning the wafer within a chamber of a plasma etcher, generating plasma ions using a radio frequency power source and a plasma source gas, directing the plasma ions toward the wafer using an electric field, and focusing the plasma ions using a plasma focusing ring. The plasma focusing ring is configured to increase a flux of plasma ions arriving at a surface of the wafer to control the formation of the plurality of features and structures associated therewith. |
申请公布号 |
US2014191415(A1) |
申请公布日期 |
2014.07.10 |
申请号 |
US201414147201 |
申请日期 |
2014.01.03 |
申请人 |
SKYWORKS SOLUTIONS, INC. |
发明人 |
Berkoh Daniel Kwadwo Amponsah;Woodard Elena Becerra;Scott Dean G. |
分类号 |
H01L21/3065 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
1. A method of etching a wafer, the method comprising:
positioning the wafer within a chamber of a plasma etcher; generating plasma ions using a radio frequency power source and a plasma source gas; directing the plasma ions toward the wafer using an electric field; focusing the plasma ions using a plasma focusing ring to increase a flux of plasma ions arriving at a surface of the wafer; and etching a plurality of through-wafer vias in the wafer. |
地址 |
Woburn MA US |