发明名称 |
MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE |
摘要 |
<p>Provided is a member for semiconductor manufacturing device which hardly causes component contamination and is capable of sufficiently reducing generation of particles in a semiconductor manufacturing device. A spray coating is formed by spraying a ceramic onto a mounting member of a transfer arm, and laser beam is irradiated to the spray coating to remelt and resolidify the ceramic composition for modification to thereby form a high-strength ceramic layer made from a ceramic recrystallized material and having a net-like crack, whereby particles dropped out from the mounting member due to external factors in a semiconductor manufacturing device are reduced to an extent not affecting a semiconductor manufacturing process.</p> |
申请公布号 |
KR20140088500(A) |
申请公布日期 |
2014.07.10 |
申请号 |
KR20137029414 |
申请日期 |
2012.04.11 |
申请人 |
TOCALO CO., LTD. |
发明人 |
INABA MITSUHARU;YOKOTA HIROKI;YAMADA KEISUKE |
分类号 |
H01L21/302;B23K15/00;B23K26/34;C23C4/04;C23C4/10;C23C4/18;H01L21/263;H01L21/31 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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