发明名称 HEAT TREATMENT FURNACE
摘要 A heat treatment furnace, also referred to as a multi-chamber furnace, that includes a plurality of treatment chambers, each having heating and cooling dampers and being controllable to adjust a flow rate into the treatment chamber, the dampers of each treatment chamber being selectively and independently adjustable with respect to one another so as to allow simultaneous heat processing of a plurality of products in different treatment chambers at different respective heat treatment states depending on the amount of heating and cooling flow rates allowed to enter in each treatment chamber via the dampers.
申请公布号 US2014193762(A1) 申请公布日期 2014.07.10
申请号 US201113700160 申请日期 2011.05.27
申请人 Grenier Mario;Lévesque Nicolas;Adam Serge;Côté Christian;Grenier-Desbiens Alex;Demarest James 发明人 Grenier Mario;Lévesque Nicolas;Adam Serge;Côté Christian;Grenier-Desbiens Alex;Demarest James
分类号 H01L31/18;F27D19/00;F27B3/24;F27D7/06;F27B3/04;F27B3/20 主分类号 H01L31/18
代理机构 代理人
主权项 1. A heat treatment furnace for simultaneously heat processing a plurality of products at different respective heat treatment states, the heat treatment furnace comprising: a plurality of treatment chambers each configurable for heat processing a given product, and each being provided with a corresponding product door selectively operable between open and closed configurations for respectively allowing the introduction and removal of the given product to be processed inside the treatment chamber; at least one first damper and at least one second damper associated with each corresponding treatment chamber, each damper being selectively operable between at least one open configuration where at least one processing fluid of the furnace is allowed to enter the corresponding treatment chamber and at least one closed configuration where said at least one processing fluid is prevented from entering the corresponding treatment chamber; a first source of processing fluid being fluidly connected to each treatment chamber via a corresponding damper thereof for providing said treatment chamber with a first processing fluid; and a second source of processing fluid being fluidly connected to each treatment chamber via a corresponding damper thereof for providing said treatment chamber with a second processing fluid; the dampers of each treatment chamber being selectively and independently adjustable with respect to one another so as to allow simultaneous heat processing of a plurality of products in different treatment chambers at different respective heat treatment states depending on the amount of first and second processing fluids allowed to enter in each treatment chamber via the dampers thereof.
地址 Marie Victorian Saint-Nicolas CA