METAL OBJECT WITH DIAMOND-LIKE CARBON FILM AND METHOD FOR FORMING DIAMOND-LIKE CARBON FILM

摘要

A metallic film formation target which is an object on which a diamond-like carbon film is to be formed is placed in a flow channel through which film formation gas containing methane gas flows. The film formation gas is caused to flow at a predetermined flow rate through the flow channel during the process of raising the temperature of the film formation target from room temperature to a predetermined temperature. The film formation gas is thereby reacted with impurities in a film formation target surface for removal of the impurities from the film formation target surface and is further reacted with metallic elements exposed by the removal of impurities, thus forming a diamond-like carbon film on the film formation target surface.

主权项

1. A metal object with diamond-like carbon film, comprising:
a metallic film formation target as an object on which a diamond-like carbon film is to be formed; and a diamond-like carbon film which is formed on a film formation target surface of the film formation target by placing the film formation target in a flow channel through which film formation gas containing methane gas flows; and causing the film formation gas to flow through the flow channel at a predetermined flow rate during a process of raising the temperature of the film formation target from room temperature to a predetermined temperature to allow the film formation gas to react with impurities in the film formation target surface for removal of the impurities from the film formation target surface and further to allow the film formation gas to react with a metallic element exposed by the removal of the impurities.