ALIGNMENT SYSTEM AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

摘要

An alignment system for a laser apparatus includes a guide laser device outputting a guide laser beam, an adjusting mechanism adjusting travel directions of the guide laser beam and a laser beam from the laser apparatus, a beam path combiner controlling travel directions of the laser beam and the guide laser beam to substantially coincide with each other, a first optical detection unit provided from the beam path combiner detecting the laser and guide laser beams, a first controller controlling the adjusting mechanism based on a first optical detection unit detection result, a beam steering unit downstream from the beam path combiner controlling travel directions of the laser and guide laser beams, a second optical detection unit downstream from the beam steering unit detecting the guide laser beam, and a second controller controlling the beam steering unit based on a second optical detection unit detection result.

主权项

1. An alignment system for use with a laser apparatus, comprising:
a guide laser device configured to output a guide laser beam; an adjusting mechanism configured to adjust a travel direction of at least one of the guide laser beam and a laser beam from the laser apparatus; a beam path combiner configured to control a travel direction of the laser beam and a travel direction of the guide laser beam to substantially coincide with each other; a first optical detection unit provided downstream from the beam path combiner and configured to detect the laser beam and the guide laser beam; a first controller configured to control the adjusting mechanism based on a detection result of the first optical detection unit; a beam steering unit provided downstream from the beam path combiner and configured to control travel directions of the laser beam and the guide laser beam; a second optical detection unit provided downstream from the beam steering unit and configured to detect at least the guide laser beam; and a second controller configured to control the beam steering unit based on a detection result of the second optical detection unit.