CIRCUIT WIDTH THINNING DEFECT PREVENTION DEVICE AND METHOD OF PREVENTING CIRCUIT WIDTH THINNING DEFECT

摘要

PROBLEM TO BE SOLVED: To provide a circuit width thinning defect prevention device capable of preventing a circuit width thinning defect, and a method for preventing a circuit width thinning defect.SOLUTION: A circuit width thinning defect prevention device 1000 prevents a circuit width thinning defect of a weak portion by using first design information D1 and second design information D2 which are data related to a design for forming a circuit pattern. The circuit width thinning defect prevention device 1000 comprises: storage means 1300 for storing dam design information classified according to the type of the weak portion; analysis means 1100 for analyzing the first design information D1 to deduce the type and the position of the weak portion; matching means 1200 for extracting the dam design information corresponding to the type of the weak portion deduced by the analysis means 1100 from the dam design information stored in the storage means 1300; and change means 1400 for changing the first design information D1 to add a dam according to the dam design information extracted by the matching means 1200 to the position of the weak portion deduced by the analysis means 1100.