发明名称 FIELD EFFECT TRANSISTOR HAVING CHANNEL CORE THAT IS IMPROVED SO AS TO REDUCE LEAKAGE CURRENT AND MANUFACTURING METHOD THEREFOR
摘要 <p>PROBLEM TO BE SOLVED: To provide NWFET and fin-FET structures in which power consumption is reduced.SOLUTION: A semiconductor device includes a channel structure formed on a surface of a substrate, and the channel structure 303/304 is formed of a semiconductor material. A gate structure covers at least part of the surface of the channel structure and is constituted of a film 305 composed of an insulating material, and gate electrodes 306 and 307. A source structure is connected to one end part of the channel structure; and a drain structure is connected to the other end part of the channel structure. The channel structure includes a structure component 303 that reduces a leakage current of the semiconductor device.</p>
申请公布号 JP2014131043(A) 申请公布日期 2014.07.10
申请号 JP20130267187 申请日期 2013.12.25
申请人 RENESAS ELECTRONICS CORP 发明人 HIRAI TOMOHIRO;MOCHIZUKI SHOGO;NAGUMO TOSHIHARU
分类号 H01L29/786;H01L29/06 主分类号 H01L29/786
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