OPTICAL IMAGING DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a device for reducing effect of dynamic fluctuation due to pressure difference between optical element atmospheres in an optical imaging device for microlithography.SOLUTION: An optical imaging device comprises: at least one optical element 109; and at least one holding device 104 coupled to the optical element 109. The holding device 104 holds the optical element 109, a first part 109.1 of the optical element 109 is made to contact with a first atmosphere, and a second part 109.2 of the optical element 109 at least temporarily is made to contact with a second atmosphere. The optical imaging device further comprises a reducing device 115 for reducing at least dynamic fluctuation due to pressure difference between the first atmosphere and the second atmosphere.