| 发明名称 |
APPARATUS AND METHOD FOR FABRICATING NANO RESONATOR USING LASER INTERFERENCE LITHOGRAPHY |
| 摘要 |
A method of fabricating a nano resonator, includes forming a line pattern in a first substrate, and transferring the line pattern to a second substrate including a gate electrode. The method further includes forming a source electrode and a drain electrode on the transferred line pattern. |
| 申请公布号 |
US2014191185(A1) |
申请公布日期 |
2014.07.10 |
| 申请号 |
US201314094178 |
申请日期 |
2013.12.02 |
| 申请人 |
Korea University Industrial & Academic Collaboration Foundation ;SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM Duck Hwan;SONG In Sang;SHIN Jea Shik;PARK Ho Soo;RIEH Jae-Sung;JU Byeong Kwon |
| 分类号 |
B81C1/00;B81B3/00 |
主分类号 |
B81C1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A nano resonator comprising:
a gate electrode formed on a substrate; and a line pattern formed over the gate electrode and connecting a source electrode to a drain electrode. |
| 地址 |
Seoul KR |
