| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact type three-dimensional shape measuring apparatus and a probe control method capable of minimizing adverse effects on measurement accuracy of a measuring instrument by reducing deviation amplitude without generating a pressing pressure deviation of probe control.SOLUTION: The contact type three-dimensional measuring apparatus includes: a probe control part for controlling pressing pressure of a contact type probe to an object to be measured; a guide for driving a stage for moving the contact type probe in a pressing direction according to control of the control part; a displacement meter for detecting a position of the stage; a frequency characteristic measuring instrument for previously obtaining mechanical resonance frequency characteristics; a filter device for suppressing control vibration due to a mechanical resonance frequency; means for obtaining inclination information of the object to be measured; means for obtaining a filter parameter corresponding to an inclination from the inclination information of the object to be measured and the mechanical resonance frequency characteristics; and means for setting the filter parameter in the filter device. |
