发明名称 MEASUREMENT RESULT VERIFICATION SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a measurement result verification system capable of verifying a measurement result measured on an inline.SOLUTION: The measurement result verification system includes: a first measuring device for measuring an object to be inspected in each unit area and transmitting measurement result information on each unit area; a marking device for marking a code pattern having index information in each unit area of the object to be inspected; a reader for acquiring the index information on a corresponding unit area from the code pattern of a predetermined unit area of the object to be inspected; a second measuring device for re-measuring the unit area from which the index information is acquired and transmitting the remeasurement result information on the unit area; and a verification device for verifying a measurement result of the first measuring device by respectively receiving the measurement result information on the first measuring device and the remeasurement result information on the second measuring device and comparing the measurement result information on the first measuring device, which corresponds to the index information acquired by the reader, with the remeasurement result information on the second measuring device.
申请公布号 JP2014130140(A) 申请公布日期 2014.07.10
申请号 JP20130258377 申请日期 2013.12.13
申请人 DONGWOO FINE-CHEM CO LTD 发明人 JONGWOO KIM;YUN MI CHUNG;PARK JAE-HYUN
分类号 G01B11/04;G01B11/26;G01N21/956 主分类号 G01B11/04
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