| 摘要 |
PROBLEM TO BE SOLVED: To provide electrode structure for suppressing generation of cracks. SOLUTION: Anchor hole 52 which opens the surface of wiring 45 covered by a sacrificial film 51 and a nitride film 47, is formed. The anchor hole 52 is constituted of a hole 47c which the nitride film 47 has and an opening 51a of the sacrificial film 51. The hole 47c opens by entering inside the wiring 45 by first predetermined distance d1 from the edge 45a on the surface of the wiring 45. The opening 51a opens by retreating from the hole 47c by second predetermined distance d2. By existence of the first predetermined distance d1, occurrence of peeling is suppressed. COPYRIGHT: (C)2010,JPO&INPIT |
