DEVICE AND METHOD FOR IMPROVING WARPAGE PROBLEM

摘要

Disclosed are a device and a method for preventing a warpage phenomenon. The device for preventing a warpage phenomenon comprises: a plurality of flatness detecting sensors for measuring a warpage of a target product in real time and generating a flatness value; a control unit for determining a processing operation related to air suction or exhaustion for respective regions of the target product and an air pressure value of air to be suctioned and exhausted, according to the flatness value; a first air suction/exhaust unit installed on an upper side of the target product to perform the processing operation according to the air pressure value determined by the control unit; and a second air suction/exhaust part installed on a lower side of the target product to perform the processing operation according to the air pressure value determined by the control unit.