| 摘要 |
Provided is a satellite for a chemical vapor deposition device, capable of ensuring the uniformity of the temperature of the entire satellite by easily transmitting heat added to the satellite. A concave part is formed on the bottom of the satellite. The concave part has a second concave part in which a plurality of spiral pieces installed at a predetermined distance from each other is disposed at least one portion in the circumferential direction of the satellite. |
