| 摘要 |
A vaporizer for delivery of a volatile medium to a gas flow, the vaporizer comprising: a gas delivery unit which receives a flow of gas and provides a flow of gas containing a metered amount of a vaporized medium; a reservoir unit which contains a volatile medium and maintains a supply of the vaporized medium, wherein the reservoir unit is selectively fluidly connected to the gas delivery unit; a gas sensing unit for sensing a flow rate and/or composition of the gas flow; a vaporized medium sensing unit for sensing a flow rate of the vaporized medium; a manifold which includes flow paths for the vaporized medium and fluidly connects the reservoir unit and the vaporized medium sensing unit; and a control unit for controlling a flow rate of the gas flow and an amount of the vaporized medium which is metered into the gas flow. Also claimed is a vaporizer with: a thermally conductive reservoir tank; a filler assembly; sets of separate flow rate sensors; and flow sensors in stub paths. |
