发明名称 PIEZOELECTRIC MICROPHONE FABRICATED ON GLASS
摘要 <p>This disclosure provides systems, methods and apparatus for glass-encapsulated microphones. In one aspect, a glass-encapsulated microphone may include a glass substrate, an electromechanical microphone device, an integrated circuit device, and a cover glass. The cover glass may be bonded to the glass substrate with an adhesive, such as epoxy, or a metal bond ring. The cover glass may have any of a number of configurations. In some configurations, the cover glass may define an aperture for the electromechanical microphone device at an edge of the glass-encapsulated microphone. In some configurations, the cover glass may define a cavity to accommodate the integrated circuit device that is separate from a cavity that accommodates the electromechanical microphone device.</p>
申请公布号 EP2752029(A1) 申请公布日期 2014.07.09
申请号 EP20120753349 申请日期 2012.08.22
申请人 QUALCOMM MEMS TECHNOLOGIES, INC. 发明人 STEPHANOU, PHILIP JASON;BURNS, DAVID WILLIAM
分类号 H04R17/02;B81C1/00;C03C27/04;H04R19/04;H04R23/02 主分类号 H04R17/02
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