PROCESS OF PREPARING A GAP FILLER AGENT, A GAP FILLER AGENT PREPARED USING SAME, AND A METHOD FOR MANUFACTURING SEMICONDUCTOR CAPACITOR USING THE GAP FILLER AGENT

摘要

Provided are a manufacturing method of a filler for filling a gap, comprising manufacturing hydrogenation polysilazane by putting 50-70 parts by weight of ammonia based on 100 parts by weight of halo-silane at a rate of 1 to 15 g/hr after injecting the halo-silane into an alkaline solvent, a filler for filling a gap manufactured by the manufacturing method, and a manufacturing method of a semiconductor capacitor using the same.