| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating device capable of keeping airtightness of a gap formed between layers of a shell with high quality while lowering operation cost. SOLUTION: A processing chamber for processing a substrate is provided in the shell 50 formed by stacking a plurality of cylindrical shell units 51. A heater 20 is supported at an inner periphery of the shell 50, and heats the substrate. Gaps 50s formed between those stacked layers of shell units 51 are sealed with deformable sealing members 52. The sealing members 52 are belt-like and wound to cover the gaps 50s from an outer peripheral side of the shell 50. Belt-like fixing members 53 are wound from outside the sealing members 52 to clamp and fix the sealing members 52. COPYRIGHT: (C)2011,JPO&INPIT |
