| 摘要 |
The present invention relates to a susceptor manufacturing method using a substrate transfer-influenced reaction and a susceptor manufactured thereby and, more specifically, to a method and a device for manufacturing a susceptor having the entirely concave surface by obliquely depositing a reactant on a base member since the reactant is reacted by a substance transfer-influenced reaction, and a susceptor manufactured thereby. The method for manufacturing a susceptor having the concave surface comprises a step of supplying reaction gas while controlling the atmosphere of a vacuum chamber and the amount of the reaction gas to occur the substance transfer-influenced reaction; a step of depositing a deposited substance on one side of the surface of the base member to be tapered by allowing the reaction gas to be reacted by the substance transfer-influenced reaction; a step of rotating the base member at a predetermined angle; and a step of obliquely depositing the deposited substance on the other side of the surface of the base member by allowing the reaction gas to be reacted by the substance transfer-influenced reaction. |
