| 摘要 |
The present invention relates to a method for controlling device contact of a handler for testing semiconductor devices, the method capable of actively setting the optimal pressing force of a semiconductor device to allow a stable contact of the semiconductor device which is tested by being seated on a socket. The method for controlling a handler for testing the semiconductor devices in which the semiconductor devices are tested by loading the semiconductor devices to the socket by the handler, includes: a first step (S10) which applies pressure to the semiconductor device seated on the socket with a predetermined load value, tests the semiconductor device, and receives a result of testing the semiconductor device and the load value detected when applying pressure; and a second step (S20) which adjusts the pressing force applied to the next semiconductor device to be tested to be smaller than the predetermined load rate when the test result of the semiconductor device in the first step is determined to be normal, and tests the semiconductor device by pressing with the adjusted load rate. Since the optimum pressing force for a DUT test can be actively determined, a soft contact between a DUT and the socket can be realized, damages to equipment such as the socket due to excessive pressing force can be prevented, and deterioration can be prevented. |
