| 摘要 |
<p>The present invention provides a substrate alignment apparatus comprises: a first aligner having two sides of a substrate in the X direction aligned in the X direction; a second aligner having two sides of the substrate in the Y direction aligned in the Y direction, wherein at least one between the first and second aligners is installed to be rotatable on the sides of the substrate; and multiple align pins coming in contact with or spaced apart from the sides of the substrate depending on the rotational direction by a drive unit; and a load lock chamber including the same.</p> |
