A substrate fixing device is disclosed. The substrate fixing device includes a main adsorption table which adsorbs a portion of a substrate by using a plurality of adsorption holes; a secondary adsorption table which is disposed adjacent to the main adsorption table and adsorbs the remaining portion of the substrate by using a plurality of adsorption holes; a table moving unit which moves the secondary adsorption table in one axial direction; and a substrate pressurizing unit which pressurizes the substrate from the upper side of the secondary adsorption table.
申请公布号
KR20140087841(A)
申请公布日期
2014.07.09
申请号
KR20120158563
申请日期
2012.12.31
申请人
SAMSUNG ELECTRO-MECHANICS CO., LTD.
发明人
PARK, SEONG JIN;KIM, DONG SUN;JEONG, JIN IL;MAENG, DUCK YOUNG